Reconstruction of the relief of an investigated object with scanning X-ray fluorescence microanalysis and Monte Carlo simulations of surface effects

This paper describes surface effects in microscopic X-ray fluorescence analysis, including the Monte Carlo simulations of the production and the detection of characteristic radiation. A new data analysis technique is also introduced. It enables us to make improved calculations of element concentrations and to determine the shape of the surface in an analyzed spot. Finally, reliefs of two scanned objects are presented. Good results were achieved, especially for a metallic object containing chemical elements only measurable with X-ray fluorescence analysis.