Published December 1, 2019 | Version v1
Journal article Metadata-only

The failure mechanism of NiPtSi multilayer films

Creators

  • 1. State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Kunming Institute of Precious Metals, 988 Keji Road, Kunming, Yunnan, 650106 (China)

Description

In this work, NiPtSi multilayer films were deposited on Si wafer by magnetron sputtering method. The forward voltage (VF) and reverse leakage current (IR) of NiPtSi multilayer films were tested. It was found that VF and IR in some area of the wafer were abnormal as compared with others. Both kinds of multilayer films were examined by transmission electron microscopy (TEM) and energy dispersive X-ray analysis (EDAX). And the reason for abnormal electrical properties were discussed based on the microstructure observation. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/1347/1/012033

Additional details

Identifiers

DOI
10.1088/1742-6596/1347/1/012033;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
1347
Journal Issue
1
Journal Page Range
[6 p.]
ISSN
1742-6596

Conference

Title
15. International Russian-Chinese Symposium on New Materials and Technologies
Dates
16-19 Oct 2019
Place
Sochi (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
53052662
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S74: ATOMIC AND MOLECULAR PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTRIC POTENTIAL; ELECTRICAL PROPERTIES; LAYERS; LEAKAGE CURRENT; MAGNETRONS; MICROSTRUCTURE; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RADIATION
Descriptors DEC
CURRENTS; ELECTRIC CURRENTS; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; IONIZING RADIATIONS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; PHYSICAL PROPERTIES; RADIATIONS