Published 2003
| Version v1
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Sound plasma diagnostics of HF and SHF sources in immersion ion implanter
- 1. RAN, Fiziko-Tekhnologicheskij Inst., Moscow (Russian Federation)
- 2. Fizicheskij Fakul'tet MGU im. M.V. Lomonosova, Moscow (Russian Federation)
Description
no abstract available
Files
37040835.pdf
Files
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Additional details
Additional titles
- Original title (Russian)
- Зондовая диагностика плазмы VCh и SVCh источников в иммерсионном ионном имплантере
Publishing Information
- Publisher
- RAN, Moscow
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- XXX Zvenigorod conference on plasma physics and CTS. Summaries of reports
- Imprint Pagination
- [248 p.]
- Journal Page Range
- p. 192
- Report number
- INIS-RU--492
Conference
- Title
- 30. Zvenigorod conference on plasma physics and CTS
- Original Conference Title
- XXX Zvenigorodskaya konferentsiya po fizike plazmy i UTS
- Dates
- 24-28 Feb 2003
- Place
- Zvenigorod (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 37040835
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ELECTRON DENSITY; ELECTRON TEMPERATURE; ION IMPLANTATION; LANGMUIR PROBE; PLASMA DIAGNOSTICS; PLASMA EATERS; PRESSURE DEPENDENCE; PRESSURE RANGE PA
- Descriptors DEC
- ELECTRIC PROBES; FLOWMETERS; MEASURING INSTRUMENTS; METERS; PRESSURE RANGE; PROBES
Optional Information
- Notes
- 5 refs. Imprint:XXX Zvenigorodskaya konferentsiya po fizike plazmy i UTS. Tezisy dokladov