Mass spectrometer diagnostic technique in the study of stationary afterglow plasmas in helium, argon and krypton

Since some years the method of massspectrometric monitoring has become an important tool in the analysis of time resolved (or stationary) afterglow plasmas. The present thesis reports the construction and testing of a new fully bakeable UHV-stationary-afterglow-apparatus using a hollow cathode discharge as plasma source for the first time. The hollow cathode is moveable perpendicular to its axis relative to the sampling orifice (i.e. a very small hole at the centre of the plasma container's boundary), so that the radical distribution of the charged particle density can be studied. Several specific extraction conditions for ions from the plasma especially the sampling probe potential have been systematically investigated. Results are illustrated and discussed. The new apparatus has been tested by determining the ambipolar diffusion coefficient of the molecular ion He2+ in a pure Helium-plasma in thermal equilibrium. The present result (Dsub(a2) = 603 +- 38 / P0 cm2s-1) is in agreement with results reported by other workers. Finally an example for the radial behaviour of the Ar+-sampling current in an Argon-discharge for several different times in the afterglow period is given. The shown behaviour agrees relatively well with the theoretically predicted radial ion density distribution, i.e. the zero-order Ressel'function. (Author)