Published 1989
| Version v1
Book
Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing
Creators
- 1. IBM Research Div., T.J. Watson Research Center, Yorktown Heights, NY (United States)
Description
This paper reports on the performance of multilayer x-ray mirrors which is improved by smoothing the boundaries within the multilayer stack with ion bombardment at grazing angles of incidence. The process is applied to Co-C and to RhRu-C mirrors for normal incidence telescopes at λ = 64 and λ = 114 Angstrom and the reflectivity is increased by a factor of two in both cases. Accumulation of roughness during deposition is eliminated
Additional details
Publishing Information
- Publisher
- SPIE Society of Photo-Optical Instrumentation Engineers.
- Imprint Place
- Bellingham, WA (United States)
- Imprint Title
- X-ray/EUV optics for astronomy and microscopy
- Imprint Pagination
- 670 p.
- Journal Page Range
- p. 270-279.
Conference
- Title
- 33. SPIE annual international technical symposium on optical and optoelectronic applied science and engineering.
- Dates
- 6-11 Aug 1989.
- Place
- San Diego, CA (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 23068101
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BEAM OPTICS; COBALT CARBIDES; INCIDENCE ANGLE; ION COLLISIONS; LAYERS; MIRRORS; OPTICAL PROPERTIES; PERFORMANCE TESTING; REFLECTIVITY; RHODIUM CARBIDES; RUTHENIUM CARBIDES; TELESCOPES; X-RAY EQUIPMENT
- Descriptors DEC
- CARBIDES; CARBON COMPOUNDS; COBALT COMPOUNDS; COLLISIONS; EQUIPMENT; PHYSICAL PROPERTIES; RHODIUM COMPOUNDS; RUTHENIUM COMPOUNDS; SURFACE PROPERTIES; TESTING; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Secondary number(s)
- CONF-890836--.