A bright pulsed x-ray source for soft x-ray research and processing applications

Recent developments in soft X-ray technology open new possibilities in areas such as surface processing and microscopic examinations of both biological tissues and thin films. These developments, along with the development of a compact, bright laboratory soft X-ray source, make it possible to use soft X-ray technology in individual laboratories and processing facilities. The most promising sources for laboratory applications are based on magnetic compression of a gas discharge. Magnetic compression creates a hot dense plasma which is an intense source of soft X-rays in the 100 to 3000 eV range. Applications demonstrated at Maxwell and elsewhere include X-ray lithography, X-ray microscopy, surface annealing, X-ray diffraction and EXAFS