Published 1999
| Version v1
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Scientific industrial ion implantation plant 'Maestro'
Creators
- 1. Nauchno-proizvodstvennaya firma 'Kovital', Khar'kov (Ukraine)
Description
In this work description of construction and technical characteristics of ion implantation industrial equipment 'Maestro' is performed. This equipment is used for treatment of many industrial objects using ion beams with energy 60 keV. The examples of ion implantation technology using for industrial tools wear resistance increasing are described
Files
32051662.pdf
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Additional details
Additional titles
- Original title (Russian)
- Опытно-промышленная установка ионной имплантации 'Маэстроь
Publishing Information
- Imprint Title
- 3. International Symposium 'Vacuum Technology and Equipment'. ISVTE-3
- Imprint Pagination
- 173 p.
- Journal Page Range
- p. 91-94
- Report number
- INIS-UA--071(V.1)
Conference
- Title
- 3. International Symposium 'Vacuum Technology and Equipment', Vol. 1.
- Original Conference Title
- Trudy tret'ego mezhdunarodnogo simpoziuma 'Vakuumnye tekhnologii i oborudovanie', Tom 1
- Dates
- 22-24 Sep 1999
- Place
- Khar'kov (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 32051662
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COLD CATHODE TUBES; DESIGN; ION IMPLANTATION; ION SOURCES; KEV RANGE 10-100; MAGNETIC FIELDS; PENNING DISCHARGES; PHYSICAL RADIATION EFFECTS; SPECIFICATIONS; SURFACE TREATMENTS; VACUUM SYSTEMS
- Descriptors DEC
- ELECTRIC DISCHARGES; ELECTRON TUBES; ENERGY RANGE; KEV RANGE; RADIATION EFFECTS
Optional Information
- Notes
- Imprint:3. Mezhdunarodnyj Simpozium 'Vakuumnye tekhnologii i oborudovanie'. ISVTE-3