Advanced application of high brilliant synchrotron radiation and basic technology on its high sensitivity detector

The Electrotechnical Laboratory has carried out development and high grade application of insertion devices into an electron storage ring formable on characteristic synchrotron radiation beam, such as superconducting Wiggler, polarization variable undulator, and so forth, since then. This study aims at establishment of element technology required for construction of tomographic system using Wiggler radiation beam, upgrading of emission spectroscopy using undulator radiation, and development of super high efficient X-ray detector for high sensitivity testing of fluorescent X-ray. In 1998 fiscal year, on the Wiggler radiation tomography, the element technology to construct a system could be established approximately. On the emission spectroscopy using crossed retarding magnetic field type undulator for light source, by identification and testing of film thickness direction distribution of fault species in Si semiconductor insulating film effectiveness of this method could be shown definitely. And, on development of the super highly efficient X-ray detector, by using light exposing technique of semiconductor, development of high counting integrated type detector using detection of fluorescent X-ray was attempted, to succeed in trial production of a detector with 88 % in the highest filling density in the world and high energy resolution. (G.K.)