Published September 1995
| Version v1
Journal article
Fabrication of vacuum ultraviolet blazed grating for synchrotron radiation
- 1. National Synchrotron Radiation Laboratory, USTC (China)
Description
A fused quartz blazed grating of 1200 lines/mm with blazed angle 5 degree 10' was fabricated by holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating grating are investigated. The finished blazed grating is tested on a Seya-Namioka monochromator for photochemistry at National Synchrotron Radiation Laboratory
Additional details
Publishing Information
- Journal Title
- Journal of China University of Science and Technology
- Journal Volume
- 25
- Journal Issue
- 3
- Journal Page Range
- p. 298-301.
- ISSN
- 0253-2778
- CODEN
- CKHPD7
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 27023133
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- BRAZING; DIFFRACTION GRATINGS; ETCHING; FABRICATION; FAR ULTRAVIOLET RADIATION; HOLOGRAPHY; ION BEAMS; MONOCHROMATORS; PHOTOCHEMISTRY; SYNCHROTRON RADIATION
- Descriptors DEC
- BEAMS; BREMSSTRAHLUNG; CHEMISTRY; ELECTROMAGNETIC RADIATION; JOINING; RADIATIONS; ULTRAVIOLET RADIATION; WELDING