Published September 1, 1982 | Version v1
Journal article

Self-heated thermocouples for far-infrared detection

  • 1. Division of Engineering and Applied Science, California Institute of Technology, Pasadena, California 91125

Description

A novel self-heated Bi-Sb thermocouple for far-infrared detection has been developed. The detector is suitable for integration with monolithic antennas and imaging arrays. The device is fabricated in a single photolithography masking step using a photoresist-bridge technique. This bridge technique has also been used to make microbolometers with lower 1/f noise than those made by two conventional masking steps. The thermocouples have a noise equivalent power (NEP) of 7 x 10-10 W/(√Hz) and a 3-dB frequency response of 150 kHz

Additional details

Publishing Information

Journal Title
Appl. Phys. Lett.
Journal Volume
41
Journal Issue
5
Series
Appl. Phys. Lett.
Journal Page Range
400-402
ISSN
0003-6951