Published September 1, 1982
| Version v1
Journal article
Self-heated thermocouples for far-infrared detection
Creators
- 1. Division of Engineering and Applied Science, California Institute of Technology, Pasadena, California 91125
Description
A novel self-heated Bi-Sb thermocouple for far-infrared detection has been developed. The detector is suitable for integration with monolithic antennas and imaging arrays. The device is fabricated in a single photolithography masking step using a photoresist-bridge technique. This bridge technique has also been used to make microbolometers with lower 1/f noise than those made by two conventional masking steps. The thermocouples have a noise equivalent power (NEP) of 7 x 10-10 W/(√Hz) and a 3-dB frequency response of 150 kHz
Additional details
Publishing Information
- Journal Title
- Appl. Phys. Lett.
- Journal Volume
- 41
- Journal Issue
- 5
- Series
- Appl. Phys. Lett.
- Journal Page Range
- 400-402
- ISSN
- 0003-6951
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 14725257
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- ANTENNAS; ANTIMONY; BISMUTH; BOLOMETERS; FABRICATION; FAR INFRARED RADIATION; HEATING; IMAGES; INTEGRATED CIRCUITS; NOISE; RADIATION DETECTION; RADIATION EFFECTS; RESPONSE FUNCTIONS; THERMOCOUPLES
- Descriptors DEC
- ELECTRICAL EQUIPMENT; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; ELEMENTS; EQUIPMENT; FUNCTIONS; INFRARED RADIATION; MEASURING INSTRUMENTS; METALS; RADIATIONS