Two-dimensional optical scanner with monolithically integrated glass microlens

A miniaturized two-dimensional forward optical scanner with a monolithically integrated glass microlens was developed for microendoscopic imaging applications. The fabricated device measures 2.26 × 1.97 × 0.62 mm³ in size and a through-silicon microlens with a diameter of 400 µm and numerical aperture of 0.37 has been successfully integrated within the silicon layer. An XY stage structure with lens shuttle and comb actuators was designed, and proprietary glass isolation blocks were utilized in mechanical and electric isolation of X- and Y-axis actuators. Resonant frequencies of the stage in X and Y directions were 3.238 and 2.198 kHz and quality factors were 168 and 69.1, respectively, at atmospheric pressure. Optical scanning test has been performed and scan angles of ±4.7° and ±4.9° were achieved for X and Y directions, respectively. (paper)