Published December 15, 2003
| Version v1
Journal article
Non-vacuum and PLD growth of next generation TCO materials
Description
Transparent conducting oxides represent a key component in a number of important opto-electronic technologies. The demand for improved materials is increasing. It is increasingly important to develop improved materials and process techniques. We report on the PLD growth of both Mo doped In-O, an n-type material with enhanced mobilities, and p-type Ca-CuInO2 films with improved conductivity. In both cases, very high quality films have been obtained with improved opto-electronic properties. We also report on a solution based route to p-type Cu2SrO2 which has produced phase pure films
Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2003.08.008;
- PII
- S0040609003011507;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 445
- Journal Issue
- 2
- Journal Page Range
- p. 193-198
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- 3. international symposium on transparent oxide thin films for electronics and optics
- Dates
- 10-11 Apr 2003
- Place
- Tokyo (Japan)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37013691
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ABLATION; COPPER OXIDES; DOPED MATERIALS; ENERGY BEAM DEPOSITION; INDIUM OXIDES; LASER RADIATION; LASERS; PULSED IRRADIATION; SOLAR CELLS; THIN FILMS
- Descriptors DEC
- CHALCOGENIDES; COPPER COMPOUNDS; DEPOSITION; DIRECT ENERGY CONVERTERS; ELECTROMAGNETIC RADIATION; EQUIPMENT; FILMS; INDIUM COMPOUNDS; IRRADIATION; MATERIALS; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; RADIATIONS; SOLAR EQUIPMENT; SURFACE COATING; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.