Published 1988 | Version v1
Book Metadata-only

Design study of a synchrotron radiation source for X-ray lithography

Creators

  • 1. INFN, Lab. Nazionali di Frascati, Via E. Fermi 40, 00044 Frascati (Italy)
  • 2. Dept. Energetica, Univ. la Sapienza, Via A. Scarpa 16, 00161 Roma (Italy)
  • 3. ENEA, Centro di Frascati, Via E. Fermi, 00044 Frascati (Italy)
  • 4. Dept. Scienze Fisiche, Univ. di Napoli, Mostra d'Oltremare, pad. 20, Napoli (Italy)
  • 5. Univ. delle Scienze e Tecnologia della Cina, Hefei Anhui (China)

Description

This paper presents the design of an electron storage ring for industrial X-ray Lithography. The parameter optimization is based on the requirements set by lithography on the radiation spectrum and on beam source sizes, and on general specifications for the machine performance such as long life time, beam stability, and reliable operation at the design current. High field conventional magnets are used in the storage ring

Additional details

Publishing Information

Publisher
World Scientific Pub. Co.
Imprint Place
Teaneck, NJ (USA)
ISBN
9971-50-642-4
Imprint Title
European particle accelerator conference
Imprint Pagination
1545 p.
Journal Page Range
p. 1483.

Conference

Title
1. European particle accelerator conference (EPAC-1).
Dates
7-11 Jun 1988.
Place
Rome (Italy).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
22085376
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BEAM DYNAMICS; ELECTRON SOURCES; MAGNETS; PERFORMANCE; SPECIFICATIONS; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES; X-RAY EQUIPMENT
Descriptors DEC
DYNAMICS; EQUIPMENT; MECHANICS; PARTICLE SOURCES; RADIATION SOURCES

Optional Information

Secondary number(s)
CONF-880695--.