Published November 26, 2012 | Version v1
Journal article

Plasma flares in high power impulse magnetron sputtering

  • 1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720 (United States)

Description

Self-organized ionization zones and associated plasma flares were recorded with fast cameras in side-on view. Flare velocities were estimated to be about 20 000 m/s suggesting that the local tangential field Eξ is about 2000 V/m based on a concept where flare-causing electrons are initially ejected by Eξ×B drift. At distances of 10 mm and greater from the target, where the electric field is very small, plasma flares are guided by the magnetic field B.

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
101
Journal Issue
22
Journal Page Range
p. 224102-224102.5
ISSN
0003-6951
CODEN
APPLAB

Optional Information

Notes
(c) 2012 American Institute of Physics