Published November 26, 2012
| Version v1
Journal article
Plasma flares in high power impulse magnetron sputtering
- 1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720 (United States)
Description
Self-organized ionization zones and associated plasma flares were recorded with fast cameras in side-on view. Flare velocities were estimated to be about 20 000 m/s suggesting that the local tangential field Eξ is about 2000 V/m based on a concept where flare-causing electrons are initially ejected by Eξ×B drift. At distances of 10 mm and greater from the target, where the electric field is very small, plasma flares are guided by the magnetic field B.
Additional details
Identifiers
- DOI
- 10.1063/1.4768925;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 101
- Journal Issue
- 22
- Journal Page Range
- p. 224102-224102.5
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 44048256
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- ELECTRIC DISCHARGES; ELECTRIC FIELDS; IONIZATION; LASER RADIATION; LASER-PRODUCED PLASMA; MAGNETIC FIELDS; MAGNETRONS; PLASMA; PLASMA DIAGNOSTICS; SPUTTERING; VISIBLE RADIATION
- Descriptors DEC
- ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; MICROWAVE EQUIPMENT; MICROWAVE TUBES; PLASMA; RADIATIONS
Optional Information
- Notes
- (c) 2012 American Institute of Physics