Published 1995
| Version v1
Miscellaneous
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Focussed ion beam lithography using a MeV proton beam microprobe for micro optics fabrication
- 1. Melbourne Univ., Parkville, VIC (Australia). School of Physics
Description
Short communication
Files
28072842.pdf
Files
(25.4 kB)
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Additional details
Publishing Information
- Publisher
- Accademic Press.
- Imprint Title
- Ninth international conference on ion beam modification of materials. Book of abstracts
- Imprint Pagination
- 452 p.
- Journal Page Range
- p. 7008.
- Report number
- INIS-AU--0004
Conference
- Title
- 9. international conference on ion beam modification of materials.
- Acronym
- IBMM'95
- Dates
- 5-10 Feb 1995.
- Place
- Canberra (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 28072842
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ETCHING; MEV RANGE 01-10; MICROELECTRONICS; OPTICAL FIBERS; PENETRATION DEPTH; PHYSICAL RADIATION EFFECTS; PMMA; PROTON BEAMS; PROTON CHANNELING; SURFACE PROPERTIES; SYNCHROTRON RADIATION SOURCES
- Descriptors DEC
- BEAMS; CHANNELING; ENERGY RANGE; ESTERS; FIBERS; MEV RANGE; NUCLEON BEAMS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PARTICLE BEAMS; POLYACRYLATES; POLYMERS; POLYVINYLS; RADIATION EFFECTS; RADIATION SOURCES