Simulation of a semitransparent conducting mesh electrode for plasma immersion ion implantation

Particle-in-cell simulations of plasma evolution in the vicinity of a mesh electrode that is semitransparent to ions are presented. Space-charge accumulation and ion focusing have an important effect on the ion trajectories and ion energy distribution inside the mesh. The results indicate that when such an electrode is used to assist plasma immersion ion implantation of insulating targets, the initial plasma conditions and mesh geometry are key factors in achieving optimum dose uniformity and implanted ion energy