Published July 1994
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Irradiation-effects of CO2 cluster ion beams on solid surface
- 1. Kyoto Univ. (Japan). Faculty of Engineering
Description
Gas-cluster ion beams can be applied to new surface modification techniques such as surface cleaning, low damage sputtering and shallow junction formation. The effects of energetic CO2 cluster impacts on solid surface were studied for cluster energies of 10keV. Irradiation effects were studied by AFM and RBS. A very flat Pt/Si surface was obtained after irradiation with CO2 clusters, which indicates lateral sputtering effect at the surface. CO2 cluster ion irradiation on Cu/Si produced lower damage than CO2 monomer ion irradiation. (author)
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Additional details
Publishing Information
- Imprint Title
- Annual report of Radiation Laboratory Department of Nuclear Engineering Kyoto University for fiscal 1993
- Imprint Pagination
- 163 p.
- Journal Page Range
- p. 110-112.
- Report number
- INIS-JP--029
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 26049173
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- CARBON DIOXIDE; CLUSTER BEAMS; COPPER; ION BEAMS; IRRADIATION; PHYSICAL RADIATION EFFECTS; PLATINUM; RUTHERFORD SCATTERING; SURFACE CLEANING
- Descriptors DEC
- BEAMS; CARBON COMPOUNDS; CARBON OXIDES; CHALCOGENIDES; CLEANING; ELASTIC SCATTERING; ELEMENTS; METALS; OXIDES; OXYGEN COMPOUNDS; PLATINUM METALS; RADIATION EFFECTS; SCATTERING; SURFACE FINISHING; TRANSITION ELEMENTS