Electron energy-loss spectroscopy for elemental analysis

Electron-beam microanalysis is most commonly carried out by recording the spectrum of X-rays emitted from a sample. However, an alternative method is to analyse the energy spectrum of electrons transmitted through a thin specimen. For the detection and measurement of elements of low atomic number, this energy-loss method is capable of high sensitivity; detection of less than 10-20 g has been reported, while the attainable spatial resolution is probably below 1 nm. After outlining the basic physics involved, the paper gives examples of energy-loss analysis of thin films, intercalation compounds, ceramics and biological samples, and its application to the measurement of radiation damage in organic materials. (author)