Published August 1, 1991
| Version v1
Journal article
Lateral variance of implanted ions
Description
A quadratic model is presented whereby the depth-dependent lateral variance of ions implanted into amorphous targets may be estimated from a knowledge of the first seven moments of the distribution. We compare our results, and those derived using a perturbation approach against high resolution Monte-Carlo data. (author)
Additional details
Publishing Information
- Journal Title
- Electronics Letters
- Journal Volume
- 27
- Journal Issue
- 16
- Series
- Electron. Lett.
- Journal Page Range
- 1402-1403
- ISSN
- 0013-5194
- CODEN
- ELLEA
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 23010408
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- COMPUTERIZED SIMULATION; DOPED MATERIALS; ION IMPLANTATION; MONTE CARLO METHOD
- Descriptors DEC
- MATERIALS; SIMULATION