Published May 2003 | Version v1
Journal article Metadata-only

A probe-positioning method with two-dimensional calibration pattern for micro-multi-point probes

Creators

  • 1. Nanotechnology Research Institute (NRI), National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 4, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8562 (Japan)
  • 2. Nanomaterials Laboratory (NML), National Institute for Materials Science (NIMS), 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047 (Japan)

Description

A probe-positioning method for micro-multi-point probes that can be independently driven is proposed. By the electron-beam lithography technique, we fabricated a 0.5 mmx0.5 mm-sized probe-positioning pattern matrix consisting of 750 nmx750 nm-sized cells. Each cell has 150 nmx150 nm-sized pits that represent a bit array, which specifies its address. Reading the address information on the pattern with the microprobes allowed us not only to determine the probe positions, but also to calibrate the orientation and dimension of each scan

Additional details

Identifiers

DOI
10.1063/1.1569390;

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
74
Journal Issue
5
Journal Page Range
p. 2722-2725
ISSN
0034-6748
CODEN
RSINAK

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
35057359
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Numerical Data
Descriptors DEI
CALIBRATION; ELECTRON BEAMS; ELECTRON PROBES; EXPERIMENTAL DATA; NANOSTRUCTURES; ORIENTATION; POSITIONING; SURFACE COATING
Descriptors DEC
BEAMS; DATA; DEPOSITION; INFORMATION; LEPTON BEAMS; NUMERICAL DATA; PARTICLE BEAMS; PROBES

Optional Information

Notes
(c) 2003 American Institute of Physics.