Spectroscopic raman nanometrology of graphene and graphene multilayers on arbitrary substrates

Raman spectroscopy is known to be an effective tool for characterization of graphene and graphene multilayers on the standard Si/SiO2 (300 nm) substrates, which allows one to determine non-destructively the number of the graphene layers and assess their quality. The Raman phonon peaks undergo modification when graphene is placed on other substrates due to changes in the nature and density of the defects, surface charges and different strength of the graphene - substrate bonding. We show that despite the spectrum variations the deconvolution of the double-resonant 2D band allows one to identify the number of graphene layers even on amorphous glass substrates. The results extend the application of Raman spectroscopy as nanometrology tool for graphene and graphene-based devices