Published July 1, 2013
| Version v1
Journal article
Micromachining of commodity plastics by proton beam writing and fabrication of spatial resolution test-chart for neutron radiography
Creators
- 1. Quantum Beam Science Directorate, Japan Atomic Energy Agency (JAEA), Tokai, Ibaraki 319-1195 (Japan)
- 2. Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency (JAEA), Takasaki, Gunma 370-1292 (Japan)
- 3. Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871 (Japan)
Description
Proton beam writing is a direct-write technique and a promising method for the micromachining of commodity plastics such as acrylic resins. Herein, we describe the fabrication of microscopic devices made from a relatively thick (∼75 μm) acrylic sheet using proton beam writing. In addition, a software package that converts image pixels into coordinates data was developed, and the successful fabrication of a very fine jigsaw puzzle was achieved. The size of the jigsaw puzzle pieces was 50 × 50 μm. For practical use, a prototype of a line and space test-chart was also successfully fabricated for the determination of spatial resolution in neutron radiography
Availability note (English)
Available from http://dx.doi.org/10.1016/j.nimb.2012.10.030Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2012.10.030;
- PII
- S0168-583X(12)00667-2;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 306
- Journal Page Range
- p. 299-301
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 13. international conference on microprobe technology and applications; 6. workshop on proton beam writing
- Acronym
- ICNMATA2012
- Dates
- 22-27 Jul 2012
- Place
- Lisbon (Portugal)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 45065212
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COMPUTER CODES; FABRICATION; IMAGES; MACHINING; NEUTRON RADIOGRAPHY; PLASTICS; PROTON BEAMS; RESINS; SHEETS; SPATIAL RESOLUTION
- Descriptors DEC
- BEAMS; INDUSTRIAL RADIOGRAPHY; MATERIALS; MATERIALS TESTING; NONDESTRUCTIVE TESTING; NUCLEON BEAMS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PARTICLE BEAMS; PETROCHEMICALS; PETROLEUM PRODUCTS; POLYMERS; RESOLUTION; SYNTHETIC MATERIALS; TESTING
Optional Information
- Copyright
- Copyright (c) 2012 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.