Published July 1, 2013 | Version v1
Journal article

Micromachining of commodity plastics by proton beam writing and fabrication of spatial resolution test-chart for neutron radiography

  • 1. Quantum Beam Science Directorate, Japan Atomic Energy Agency (JAEA), Tokai, Ibaraki 319-1195 (Japan)
  • 2. Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency (JAEA), Takasaki, Gunma 370-1292 (Japan)
  • 3. Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871 (Japan)

Description

Proton beam writing is a direct-write technique and a promising method for the micromachining of commodity plastics such as acrylic resins. Herein, we describe the fabrication of microscopic devices made from a relatively thick (∼75 μm) acrylic sheet using proton beam writing. In addition, a software package that converts image pixels into coordinates data was developed, and the successful fabrication of a very fine jigsaw puzzle was achieved. The size of the jigsaw puzzle pieces was 50 × 50 μm. For practical use, a prototype of a line and space test-chart was also successfully fabricated for the determination of spatial resolution in neutron radiography

Availability note (English)

Available from http://dx.doi.org/10.1016/j.nimb.2012.10.030

Additional details

Identifiers

DOI
10.1016/j.nimb.2012.10.030;
PII
S0168-583X(12)00667-2;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
306
Journal Page Range
p. 299-301
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
13. international conference on microprobe technology and applications; 6. workshop on proton beam writing
Acronym
ICNMATA2012
Dates
22-27 Jul 2012
Place
Lisbon (Portugal)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
45065212
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
COMPUTER CODES; FABRICATION; IMAGES; MACHINING; NEUTRON RADIOGRAPHY; PLASTICS; PROTON BEAMS; RESINS; SHEETS; SPATIAL RESOLUTION
Descriptors DEC
BEAMS; INDUSTRIAL RADIOGRAPHY; MATERIALS; MATERIALS TESTING; NONDESTRUCTIVE TESTING; NUCLEON BEAMS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PARTICLE BEAMS; PETROCHEMICALS; PETROLEUM PRODUCTS; POLYMERS; RESOLUTION; SYNTHETIC MATERIALS; TESTING

Optional Information

Copyright
Copyright (c) 2012 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.