Published 1981
| Version v1
Book
A simple sputer ion source for the production of ions beams of metals
- 1. Reactor Research Centre, Kalpakkam (India)
Description
A sputter ion source capable of producing ion beams of metallic elements, has been designed and fabricated. Such ion sources find application in ion implantation studies. (author)
Additional details
Publishing Information
- Publisher
- Department of Atomic Energy.
- Imprint Place
- Bombay (India)
- Imprint Title
- Silver Jubilee Physics Symposium: 25th year of nuclear physics and solid state physics symposium [Papers]
- Imprint Pagination
- 279 p.
- Journal Page Range
- p. 225-226.
Conference
- Title
- Nuclear physics and solid state physics symposium.
- Dates
- 28 Dec 1981 - 1 Jan 1982.
- Place
- Bombay (India).
INIS
- Country of Publication
- India
- Country of Input or Organization
- India
- INIS RN
- 17020240
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ARGON IONS; BEAM EXTRACTION; FABRICATION; ION BEAMS; ION SOURCES; METALS; SPUTTERING
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; ELEMENTS; IONS