Published 1981 | Version v1
Book

A simple sputer ion source for the production of ions beams of metals

  • 1. Reactor Research Centre, Kalpakkam (India)

Description

A sputter ion source capable of producing ion beams of metallic elements, has been designed and fabricated. Such ion sources find application in ion implantation studies. (author)

Additional details

Publishing Information

Publisher
Department of Atomic Energy.
Imprint Place
Bombay (India)
Imprint Title
Silver Jubilee Physics Symposium: 25th year of nuclear physics and solid state physics symposium [Papers]
Imprint Pagination
279 p.
Journal Page Range
p. 225-226.

Conference

Title
Nuclear physics and solid state physics symposium.
Dates
28 Dec 1981 - 1 Jan 1982.
Place
Bombay (India).

INIS

Country of Publication
India
Country of Input or Organization
India
INIS RN
17020240
Subject category
S74: ATOMIC AND MOLECULAR PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ARGON IONS; BEAM EXTRACTION; FABRICATION; ION BEAMS; ION SOURCES; METALS; SPUTTERING
Descriptors DEC
BEAMS; CHARGED PARTICLES; ELEMENTS; IONS