Published September 1988
| Version v1
Journal article
Polarization processes and electric transformations in pyrolytic oxides SiO2 on the surface of indium antimonide
- 1. Petrozavodskij Gosudarstvennyj Univ. (USSR)
Description
Changes of a flatband voltage, V-C characteristics hysteresis width, injection stability, density of the surface states after polarization at elevated temperatures with a subsequent cooling are studied. It is shown that a change of electrical parameters of MOS-structures is associated with a field dissociation of water molecules, spatial separation of protons H+ and ions OH-, their partial discharging at the interface and the uccerence of electrochemical reactions oxidation - reduction
Additional details
Additional titles
- Original title (Russian)
- Поляризационные процессы и электропревращения в пиролитических оксидах SiO
Publishing Information
- Journal Title
- Poverkhnost': Fizika, Khimiya, Mekhanika
- Journal Issue
- no.9
- Series
- Poverkhn.: Fiz., Khim., Mekh.
- CODEN
- PFKMD
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 20029021
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANTIMONIDES; CHEMISORPTION; ELECTRIC POTENTIAL; FILMS; INDIUM ALLOYS; LOW TEMPERATURE; MEDIUM TEMPERATURE; MOS TRANSISTORS; N-TYPE CONDUCTORS; OXIDATION; POLARIZATION; REDUCTION; SILICON OXIDES; SUBSTRATES
- Descriptors DEC
- ALLOYS; ANTIMONY COMPOUNDS; CHALCOGENIDES; CHEMICAL REACTIONS; MATERIALS; OXIDES; OXYGEN COMPOUNDS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR MATERIALS; SEPARATION PROCESSES; SILICON COMPOUNDS; TRANSISTORS