Published July 1996 | Version v1
Journal article

Correlation between surface structure and ordering in GaInP

  • 1. Department of Materials Science and Engineering, University of Utah, Salt Lake City, Utah 84112 (United States)

Description

Ga and In atoms in Ga0.52In0.48P layers spontaneously segregate to form alternating In- and Ga-rich {111} monolayers during organometallic vapor phase epitaxial (OMVPE) growth on (001) oriented GaAs substrates, thus forming the CuPt ordered structure. This ordering phenomenon is believed to be driven by surface processes, although little direct experimental information is available. This work presents evidence, based on surface photoabsorption data, that [bar 110] oriented P dimers are present on the surface during OMVPE growth using trimethylgallium and ethyldimethylindium combined with tertiarybutylphosphine, suggesting a (2x4)-like surface reconstruction. Furthermore, when the growth temperature is increased above 620 degree C, with other parameters constant, both the concentration of these P dimers and the degree of order are observed to decrease. A similar correlation of decreased P-dimer concentration with decreased degree of order is observed for decreases in V/III ratio. Thus, the changes in order parameter for variations in temperature and TBP flow rate are found to be closely correlated with the changes in the order parameter. A third parameter studied was the misorientation of the substrate from (001) toward either the {111}A or {111}B planes. The concentration of P dimers decreased as the misorientation increased in either direction. The degree of order was also observed to generally decrease, supporting the connection between surface reconstruction and ordering. However, the difference in order parameter observed for the two misorientation directions suggests the importance of a second parameter, the step structure, itself. For exactly (001) oriented substrates the surface was observed, using high resolution atomic force microscopy, to consist of islands, elongated in the [110] direction, with heights of 30 endash 60 A. (Abstract Truncated)

Additional details

Additional titles

Augmented title (English)
(Ga,In)P

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
Journal Volume
14
Journal Issue
4
Journal Page Range
p. 3013-3018.
ISSN
0734-211X
CODEN
JVTBD9

Conference

Title
23. conference on the physics and chemistry semiconductor interfaces.
Dates
21-25 Jan 1996.
Place
La Jolla, CA (United States).

INIS

Optional Information

Secondary number(s)
CONF-960117--.