Published 1971
| Version v1
Book
Ion implantation. Conference held at Thousand Oaks, California, May 4--7, 1970
Creators
Description
no abstract available
Additional details
Additional titles
- Augmented title (English)
- Collection of 58 papers
Publishing Information
- Publisher
- Gordon and Breach, Science Publishers, Inc.
- Imprint Place
- New York
- Imprint Pagination
- 474 p.
Conference
- Title
- International conference on ion implantation in semiconductors.
- Dates
- 4 May 1970.
- Place
- Thousand Oaks, California, USA.
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 4082448
- Subject category
- S36: MATERIALS SCIENCE; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ION BEAMS; ION IMPLANTATION; MEETINGS; PHYSICAL RADIATION EFFECTS; PROCEEDINGS; SEMICONDUCTOR DETECTORS; SEMICONDUCTOR MATERIALS
- Descriptors DEC
- BEAMS; DOCUMENT TYPES; MEASURING INSTRUMENTS; RADIATION DETECTORS; RADIATION EFFECTS
Optional Information
- Secondary number(s)
- CONF-700544--(Pt.2).