Published November 2003 | Version v1
Journal article Metadata-only

Characterization of B-C-N hybrid prepared by ion implantation

Creators

  • 1. Faculty of Science, Shizuoka University, Oya, Shizuoka 422-8529 (Japan)
  • 2. Japan Atomic Energy Research Institute, Tokai-mura, Naka-gun, Ibaraki 319-1195 (Japan)

Description

Ion implantation method is applied to synthesize B-C-N hybrids and their electronic structures are characterized by x-ray photoelectron spectroscopy. A boron nitride film is deposited on a graphite target by borazine plasma implantation. At the interface between the BN film and the graphite, a variety of bonding combinations including B-N, B-C, and C-N are observed. This proved that B-C-N hybrids are formed by this method

Additional details

Identifiers

DOI
10.1116/1.1611887;

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Journal Volume
21
Journal Issue
6
Journal Page Range
p. 1843-1848
ISSN
0734-2101
CODEN
JVTAD6

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
36027939
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S74: ATOMIC AND MOLECULAR PHYSICS;
Descriptors DEI
BORON; BORON NITRIDES; CARBON; CHEMICAL BONDS; ELECTRONIC STRUCTURE; GRAPHITE; ION IMPLANTATION; NITROGEN; PLASMA; THIN FILMS; X-RAY PHOTOELECTRON SPECTROSCOPY
Descriptors DEC
BORON COMPOUNDS; CARBON; ELECTRON SPECTROSCOPY; ELEMENTS; FILMS; MINERALS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PHOTOELECTRON SPECTROSCOPY; PNICTIDES; SEMIMETALS; SPECTROSCOPY

Optional Information

Notes
(c) 2003 American Vacuum Society.