Published 1992
| Version v1
Book
Organometallic precursors to vanadium and titanium carbonitride
- 1. CNRS Lab. de Chimie de Coordination, 205 Route de Narbonne, 31077 Toulouse Cedex (France)
Description
This paper reports on the syntheses, structural and thermoanalytical studies of two titanium complexes CpTiCl2N(SiMe3)2 and FTi[N(SiMe3)2]3 and one vanadium complex V(NEt2)4. CpTiCl2N(SiMe3)2 has been used in a hot wall CVD reactor as a precursor to titanium nitride. Thin films of typically 1 μm in thickness have been deposited at 600 degrees C on glass, silicon and tool steel. XPS analyses of the deposits show titanium carbonitride to be formed. The new FTi[N(SiMe3)2]3 complex can also be used as a precursor to titanium nitride. V(NEt2)4 led at 500 degrees C to the deposition of vanadium carbonitride characterized by XPS analysis. Films tended to contain excess free carbon
Additional details
Publishing Information
- Publisher
- Materials Research Society.
- Imprint Place
- Pittsburgh, PA (United States)
- ISBN
- 1-55899-166-2
- Imprint Title
- Proceedings of better ceramics through chemistry V
- Imprint Pagination
- 969 p.
- Journal Page Range
- p. 875-880.
Conference
- Title
- 1992 Material Research Society (MRS) spring meeting.
- Dates
- 27 Apr - 2 May 1992.
- Place
- San Francisco, CA (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 24026043
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- GLASS; MICROSTRUCTURE; ORGANOMETALLIC COMPOUNDS; SILICON; STEELS; SUBSTRATES; TEMPERATURE RANGE 0400-1000 K; THERMODYNAMIC PROPERTIES; THIN FILMS; TITANIUM COMPLEXES; TITANIUM NITRIDES; VANADIUM COMPLEXES; X-RAY SPECTRA
- Descriptors DEC
- ALLOYS; CARBON ADDITIONS; COMPLEXES; CRYSTAL STRUCTURE; ELEMENTS; FILMS; IRON ALLOYS; IRON BASE ALLOYS; NITRIDES; NITROGEN COMPOUNDS; ORGANIC COMPOUNDS; PHYSICAL PROPERTIES; PNICTIDES; SEMIMETALS; SPECTRA; TEMPERATURE RANGE; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPLEXES; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Secondary number(s)
- CONF-920402--.