Study of penetration depth for V+ with low energy implanted in peanut seeds

The penetration depth and concentration distribution for vanadium ions with low energy implanted into the dry peanut seeds is determined by scanning electron microscope and X-ray energy dispersion spectrometer. The results show that the depth-concentration distribution is a Gaussian distribution with a long tail and the maximum penetration depth is about 13.6 μm for V+ with 200 keV in cotyledon of the peanut. The experimental result of the implanted V+ range in the peanut seeds is compared with the calculating value of the TRIM95