Published January 19, 2007
| Version v1
Journal article
A New Attachment of the Large Debye-Scherrer Camera at BL02B2 of the SPring-8 for Thin Film X-ray Diffraction
- 1. Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan)
- 2. CREST/JST, Honcho, Kawaguchi, Saitama 332-0012 (Japan)
- 3. RIKEN, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan)
Description
We have developed a new attachment for thin film x-ray measurements equipped with the large Debye-Scherrer camera at BL02B2 of the SPring-8. It is quite easy to handle and control the attachment using user-friendly computer programs. It is also notable that the attachment realizes both low-glancing-angle incident beam condition and in-plane measurement condition. The attachment enables us to measure high precision x-ray diffraction data from many kinds of thin films with the Debye-Scherrer camera. Using this attachment we try to analyze some dimensionally controlled thin film structures
Additional details
Identifiers
- DOI
- 10.1063/1.2436412;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 879
- Journal Issue
- 1
- Journal Page Range
- p. 1771-1774
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 9. international conference on synchrotron radiation instrumentation
- Dates
- 28 May - 2 Jun 2006
- Place
- Daegu (Korea, Republic of)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 39061464
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ACCURACY; CAMERAS; COMPUTER CODES; CONTROL; CRYSTAL STRUCTURE; SPRING-8 STORAGE RING; THIN FILMS; X-RAY DIFFRACTION
- Descriptors DEC
- COHERENT SCATTERING; DIFFRACTION; FILMS; RADIATION SOURCES; SCATTERING; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES
Optional Information
- Notes
- (c) 2007 American Institute of Physics