Published October 2001 | Version v1
Report

MOVPE of (AlGaIn)P under the carrier gas nitrogen for LED structures

Description

This thesis dealt with the metal-organic gas phase epitaxy with nitrogen as carrier gas. For this first by means of three-dimensional modelings of the epitaxy process the influence of the carrier gas on the processes was explained. The optimization of the growth parameter for the whole light-emitting-diode structure in double-hetero arrangement resulted that an a temperature of 770 C and a V/ III-ratio of 150 layers with a high crystal quality could be reached

Availability note (English)

Available from TIB Hannover: RA 831(3909)

Additional details

Additional titles

Original title (German)
MOVPE von (AlGaIn)P unter dem Traegergas Stickstoff fuer LED-Strukturen

Publishing Information

Imprint Pagination
135 p.
ISSN
0944-2952
Report number
Juel--3909