Great enhancement of pyroelectric properties for Ba0.65Sr0.35TiO3 films on Pt-Si substrates by inserting a self-buffered layer
Creators
- 1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronics Science and Technology of China, Chengdu 610054 (China)
Description
(100)-Ba0.65Sr0.35TiO3 (BST) films were deposited on Pt/Ti/SiO2/Si substrates using a low-temperature self-buffered layer. X-ray diffraction and atomic force microscope investigations show that the microstructure of BST films strongly depends on surface morphology of annealed self-buffered layer. The mechanism of nucleus formation and the growth initiation of BST films on self-buffered layers were proposed. It was found that the pyroelectric properties of BST films can be greatly enhanced. The pyroelectric coefficient and material merit figure of (100)-BST films are 1.16x104 μC m-2 K-1 and 2.18x10-4 Pa-1/2, respectively. The detectivity of 9.4x107 cm Hz1/2 W-1 was obtained in the (100)-BST film capacitors thermally isolated by 500 nm SiO2 films
Additional details
Identifiers
- DOI
- 10.1063/1.3081971;
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 105
- Journal Issue
- 4
- Journal Page Range
- p. 044107-044107.4
- ISSN
- 0021-8979
- CODEN
- JAPIAU
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 40062305
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; ATOMIC FORCE MICROSCOPY; BARIUM COMPOUNDS; CAPACITORS; CRYSTAL GROWTH; DEPOSITION; DIELECTRIC MATERIALS; ELECTRIC CHARGES; LAYERS; MICROSTRUCTURE; MORPHOLOGY; PLATINUM; SILICON OXIDES; SPUTTERING; STRONTIUM TITANATES; SUBSTRATES; TEMPERATURE DEPENDENCE; THIN FILMS; TITANIUM; X-RAY DIFFRACTION
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; ELECTRICAL EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; HEAT TREATMENTS; MATERIALS; METALS; MICROSCOPY; OXIDES; OXYGEN COMPOUNDS; PLATINUM METALS; SCATTERING; SILICON COMPOUNDS; STRONTIUM COMPOUNDS; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS
Optional Information
- Notes
- (c) 2009 American Institute of Physics