Computerized microtomography of objects in X-ray and optical scanning microscopy

A multi-functional universal microtomographic complex on the base of a scanning electron microscope for restoration of the internal structure of the object-investigated is described. It is marked that for providing maximum contrast it is necessary to use a soft component of bremsstrahlung X-ray radiation (electron beam energy to 35 keV, beam current - 10-7 A, target materials - Cu or Al). The Fourier transformation is used for the obtained two-dimensional data file processing to synthesize control algorithms. It provides sufficiently high speed of response of the system. The conclusion on applicability of the complex considered both for X-rays and for object radiation in the optical (including UV) range has been made