Published 2000
| Version v1
Miscellaneous
Monte Carlo Simulation of the concentration distribution of sputtered cathode material in glow discharge plasma
Creators
- 1. Maria Sklodowska-Curie University, Institute of Physics, Lublin (Poland)
Description
no abstract available
Additional details
Publishing Information
- Imprint Title
- Abstracts of 3. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2000
- Imprint Pagination
- 120 p.
- Journal Page Range
- p. 36
Conference
- Title
- 3. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2000
- Dates
- 12-15 Jun 2000
- Place
- Kazimierz Dolny (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 32030001
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Non-conventional Literature
- Descriptors DEI
- ALUMINIUM; CATHODE SPUTTERING; COMPUTERIZED SIMULATION; GLOW DISCHARGES; LUMINESCENCE; MOLIERE THEORY; MONTE CARLO METHOD; NEON IONS; NITROGEN IONS; PLASMA; SPATIAL DISTRIBUTION; THOMAS-FERMI MODEL; TITANIUM
- Descriptors DEC
- ATOMIC MODELS; CALCULATION METHODS; CHARGED PARTICLES; DISTRIBUTION; ELECTRIC DISCHARGES; ELEMENTS; EMISSION; IONS; MATHEMATICAL MODELS; METALS; PHOTON EMISSION; SIMULATION; SPUTTERING; TRANSITION ELEMENTS