Thermo-mechanical simulations of CO₂ laser–fused silica interactions

CO₂ laser heating of silica glass is used in many scientific and industrial applications. Particularly, localized CO₂ laser heating of silica glass has demonstrated its ability to mitigate surface damage on optics used for high power laser applications. To develop such applications, the control of temperature, heat affected area, and resulting mechanical stresses are critical. Therefore, it is necessary to understand the silica transformation, the material ejection, and the thermo-mechanical stresses induced by the laser heating and subsequent cooling. In this paper, we detail the development of comprehensive thermo-mechanical numerical simulations of these physical processes, based on finite-element method. The approach is developed for 2D or 3D cases to tackle the case of a moving beam at the surface of the sample, and we particularly discuss the choice of the different parameters based on bibliographic inputs. The thermal and mechanical numerical results have been compared to different dedicated experimental studies: infrared thermography measurements at the surface of the irradiated area, optical profilometry measurements of the laser-processed sites, and photo-elastic measurements. Very consistent results are obtained between numerical and experimental results for the description of the temperature gradients, the material ejection, and the residual stresses.