Methods for thin foil thickness determination by using alpha spectroscopy

In both, industry and scientific research, there is a demand for the determination of material thicknesses. In this work, two methods are described which are very simple, fast, effective and low-cost to determine the exactly thickness of thin foils (μm). Both methods are based on the energy loss of alpha particles when passing through the foil and the detection by high energy resolution alpha spectroscopy. The strengths and weakness of the two methods are discussed. (orig.)