Published March 12, 1979
| Version v1
Patent
Open
Improvements in or relating to sputtering
Description
The invention describes an electrode assembly for use in a sputtering apparatus. In the sputtering assembly, a cathode mount is insulatingly supported on an anode and carries a target rod. The target rod has a much smaller surface area than the surrounding surface of the anode. High power is supplied to the cathode so that the temperature of the target rod should reach approximately 10000C. This results in a high rate of deposition and in the deposition of a pure coating. (U.K.)
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Additional details
Publishing Information
- Imprint Pagination
- 4 p.
- IPC:
- Int. Cl. C23c15/00.
- IPC
- Int. Cl. C23c15/00.
- Patent number
- GB patent document 2015581/A/
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 11506558
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ANODES; CATHODES; ELECTRIC POTENTIAL; IMPURITIES; KINETICS; RODS; SPUTTERING; SUPPORTS; SURFACE COATING; TARGETS; THERMAL INSULATION; VERY HIGH TEMPERATURE
- Descriptors DEC
- DEPOSITION; ELECTRODES; MECHANICAL STRUCTURES