Published March 12, 1979 | Version v1
Patent Open

Improvements in or relating to sputtering

Description

The invention describes an electrode assembly for use in a sputtering apparatus. In the sputtering assembly, a cathode mount is insulatingly supported on an anode and carries a target rod. The target rod has a much smaller surface area than the surrounding surface of the anode. High power is supplied to the cathode so that the temperature of the target rod should reach approximately 10000C. This results in a high rate of deposition and in the deposition of a pure coating. (U.K.)

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Additional details

Publishing Information

Imprint Pagination
4 p.
IPC:
Int. Cl. C23c15/00.
IPC
Int. Cl. C23c15/00.
Patent number
GB patent document 2015581/A/

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
11506558
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ANODES; CATHODES; ELECTRIC POTENTIAL; IMPURITIES; KINETICS; RODS; SPUTTERING; SUPPORTS; SURFACE COATING; TARGETS; THERMAL INSULATION; VERY HIGH TEMPERATURE
Descriptors DEC
DEPOSITION; ELECTRODES; MECHANICAL STRUCTURES