Real space structural analysis using 3D MEIS spectra from a toroidal electrostatic analyzer with 2D detector

A three-dimensional medium energy ion scattering (3D-MEIS) method has been developed using a commercial MEIS apparatus. This method consists of filtering the energy of the ions scattered by the sample and measuring their two-dimensional angular distribution over a large region. These cartographies of the scattered particles reveal the angular positions of the crystallographic directions and atomic planes. The method is also element sensitive and allows depth profiling by selecting the energy of the scattered particles. As an example, the MEIS cartography technique is applied on a 49 nm thick compressively strained Si0.7Ge0.3 layer deposited on a Si (1 0 0) wafer.