Published February 1976
| Version v1
Journal article
Effect of heat treatment and irradiation on oxygen state in silicon
Description
The effect of neutron irradiation followed by annealing at the temperature range from 100 to 560 deg C and heat treatment at 1.000 deg C on absorption by oxygen in silicon has been studied. The absorption is measured at the liquid nitrogen temperature. It is shown that corresponding to oxygen absorption bands are at 1.128 and 1.135 cm-1, they correspond to various oxygen states in a Si lattice. Data are presented on the changes occurring in both absorption bands under the effect of irradiation and annealing. It is assumed that the band at 1.128 cm-1 is due to the oxygen dissolved in a Si lattice, while the band at 1.136 cm-1 is associated with the oxygen present in particles of the second phase of SiO2
Additional details
Additional titles
- Original title (Russian)
- Влияние термообработки и облучения на состояние кислорода в кремнии
Publishing Information
- Journal Title
- Fiz. Tekh. Poluprovodn.
- Journal Volume
- 10
- Journal Issue
- 2
- Series
- Fiz. Tekh. Poluprovodn.
- Journal Page Range
- 320-323
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 8331407
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ABSORPTION; ABSORPTION SPECTRA; ANNEALING; CRYSTAL DEFECTS; FAR INFRARED RADIATION; HIGH TEMPERATURE; NEUTRON BEAMS; RADIATION DOSES; SILICON OXIDES; TEMPERATURE DEPENDENCE; VERY HIGH TEMPERATURE
- Descriptors DEC
- BEAMS; CHALCOGENIDES; CRYSTAL STRUCTURE; ELECTROMAGNETIC RADIATION; HEAT TREATMENTS; INFRARED RADIATION; NUCLEON BEAMS; OXIDES; OXYGEN COMPOUNDS; PARTICLE BEAMS; RADIATIONS; SILICON COMPOUNDS; SPECTRA
Optional Information
- Notes
- 5 refs.; 5 figs.; for English translation see the journal Sov. Phys. - Semicond.