Published November 26, 1991
| Version v1
Journal article
Structural changes of ZnSe/GaAs epitaxy films under soft X-ray effect
- 1. Moskovskij Inzhenerno-Fizicheskij Inst., Moscow (Russian Federation)
Description
Influence of soft X-ray effect on ZnSe epitaxial films grown on GaAs(100) sublayers is studied. Study of film surface morphology in electron microscope and X-ray diffraction analysis show that monocrystal as well as polycrystal epitaxy layers may be obtained by such a method by different technological growth parameters. Conclusion is made that soft X-ray irradiation leads to structural improvement of epitaxy layer
Additional details
Additional titles
- Original title (Russian)
- Структурные изменения эпитаксиальной пленки ZnSe/GaAs под действием мягкого рентгеновского излучения
Publishing Information
- Journal Title
- Pis'ma v Zhurnal Tekhnicheskoj Fiziki
- Journal Volume
- 17
- Journal Issue
- 22
- Journal Page Range
- p. 57-61.
- ISSN
- 0320-0116
- CODEN
- PZTFDD
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 24021570
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- EMISSION SPECTRA; EPITAXY; FILMS; GALLIUM ARSENIDES; HETEROJUNCTIONS; LASER RADIATION; MONOCRYSTALS; PHOTOLUMINESCENCE; PHYSICAL RADIATION EFFECTS; POLYCRYSTALS; SOFT X RADIATION; SUBSTRATES; ZINC SELENIDES
- Descriptors DEC
- ARSENIC COMPOUNDS; ARSENIDES; CHALCOGENIDES; CRYSTAL GROWTH METHODS; CRYSTALS; ELECTROMAGNETIC RADIATION; EMISSION; GALLIUM COMPOUNDS; IONIZING RADIATIONS; LUMINESCENCE; PHOTON EMISSION; PNICTIDES; RADIATION EFFECTS; RADIATIONS; SELENIDES; SELENIUM COMPOUNDS; SEMICONDUCTOR JUNCTIONS; SPECTRA; X RADIATION; ZINC COMPOUNDS