Published November 26, 1991 | Version v1
Journal article

Structural changes of ZnSe/GaAs epitaxy films under soft X-ray effect

  • 1. Moskovskij Inzhenerno-Fizicheskij Inst., Moscow (Russian Federation)

Description

Influence of soft X-ray effect on ZnSe epitaxial films grown on GaAs(100) sublayers is studied. Study of film surface morphology in electron microscope and X-ray diffraction analysis show that monocrystal as well as polycrystal epitaxy layers may be obtained by such a method by different technological growth parameters. Conclusion is made that soft X-ray irradiation leads to structural improvement of epitaxy layer

Additional details

Additional titles

Original title (Russian)
Структурные изменения эпитаксиальной пленки ZnSe/GaAs под действием мягкого рентгеновского излучения

Publishing Information

Journal Title
Pis'ma v Zhurnal Tekhnicheskoj Fiziki
Journal Volume
17
Journal Issue
22
Journal Page Range
p. 57-61.
ISSN
0320-0116
CODEN
PZTFDD