Published 2019 | Version v1
Book Metadata-only

Laser micromilling technology as a key for rapid ceramic MEMS devices

Creators

  • 1. Natsional'nyj Issledovatel'skij Yadernyj Univ. «MIFI», Moscow (Russian Federation)

Description

The flexible laser micromilling technology for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package is describing. Current results demonstrate that using described technology possible to manufacturing all parts of MEMS sensor in the SMD form-factor SOT-23 package type

Abstract (Russian)

Описывается технология адаптивной лазерной микрофрезеровки для изготовления керамических МЭМС-микронагревательных устройств в радиоэлектронном корпусе устройства поверхностного монтажа (SMD). Текущие результаты показывают, что с использованием описанной технологии возможно изготовление всех частей МЭМС-устройства в SMD корпусе с форм-фактором типа SOT-23
Part of:
V International conference «Laser, plasma research and technologies» LaPlaz-2019. Collection of scientific papers. Part 2

Additional details

Additional titles

Original title (Russian)
Технология лазерной микрофрезировки как ключ к быстрому прототипированию керамических MEhMS-устройств

Publishing Information

Publisher
NIYaU MIFI
Imprint Place
Moscow (Russian Federation)
ISBN
978-5-7262-2545-6
Imprint Title
V International conference #Left-Pointing Double Angle Quotation Mark#Laser, plasma research and technologies#Right-Pointing Double Angle Quotation Mark# LaPlaz-2019. Collection of scientific papers. Part 2
Imprint Pagination
388 p.
Journal Page Range
p. 358-359

Conference

Title
5. international conference on laser, plasma research and technologies
Original Conference Title
V Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii» LaPlaz-2019
Acronym
LaPlaz-2019
Dates
12-15 Feb 2019
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
53089299
Subject category
S36: MATERIALS SCIENCE; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CERAMICS; COMPUTER CODES; COMPUTERIZED SIMULATION; LASER BEAM MACHINING; MATERIALS; MILLING
Descriptors DEC
MACHINING; SIMULATION

Optional Information

Notes
1 ref., 1 fig. Imprint:V Mezhdunarodnaya konferentsiya #Left-Pointing Double Angle Quotation Mark#Lazernye, plazmennye issledovaniya i tekhnologii#Right-Pointing Double Angle Quotation Mark# LaPlaz-2019. Sbornik nauchnykh trudov. Chast' 2