Development of a 10 GHz ''multi-mode'' ECR, ion source for the production of multiply charged ions from metallic elements

An all-permanent magnet ECR ''multi-mode'' ion source with emphasis on the production of metallic ions has been built. The main feature of this ion source is a stepped plasma chamber with a larger diameter in the resonance region in order to allow the propagation of higher microwave modes than the ground mode. Ions from metallic elements can be produced using both the insertion technique and an evaporation oven. First spectra obtained for oxygen and bismuth are shown. (orig.)