Analysis of pumping performances in one-stage turbomolecular pump by 3D direct simulation Monte Carlo calculation

The turbomolecular pump (TMP) has been applied in many fields for producing high and ultrahigh vacuum. It works mainly in conditions of free molecular and transitional flow where the mathematical model is the Boltzmann equation. In this paper, direct simulation Monte Carlo (DSMC) method is applied to simulate the one-stage TMP with a 3D analysis in a rotating reference frame. Considering the Coriolis and centrifugal accelerations, the equations about the molecular velocities and position are deduced. The VSS model and NTC collision schemes are used to calculate the intermolecular collisions. The diffuse reflection is employed on the molecular reflection from the surfaces of boundary. The transmission probabilities of gas flow in two opposite flow direction, the relationship between the mass flow rate and the pressure difference, the pumping performances including the maximum compression ratio on different outlet pressures in free molecular flow and transitional flow and the maximum pumping efficiency on different blade angles are calculated. The transmission probabilities are applied to analyze the relationship between the outlet pressure and the maximum pressure ratio. The numerical results show good quantitative agreement with the existing experiment data. (authors)