Functional fabrication of micromachine using ion beam

In order to realize the functional elements for micromachines, it was proposed to apply the reforming of materials by using high energy ion implantation. For the small structures like micromachines, the methods that can be utilized for the working are limited, and also the materials and the shapes which can be utilized are limited. The realization of new functions is planned by applying the reforming using ion implantation in addition to existing working methods. By changing the kinds of ions, the amount of implantation and the temperature of implantation, the state of reforming can be controlled. When the ions of 3 MeV were implanted in silicon and stainless steel, the change in the modulus of elasticity was measured by an ultrasonic microscope, the indentation test with a small indenter and small three-point bending test, and the change in the modulus of elasticity by several tens % was found. As the main working methods for micromachines, there are photolithography, LIGA process, fine machining, discharge machining, light forming and beam machining. The solution by ion implantation for the working for adding functions, the merit of elasticity control, the evaluation of the modulus of elasticity in ion-implanted layers and so on are described. (K.I.)