Published April 9, 2007 | Version v1
Journal article

Preparation and characterization of ultra-thin sol-gel films

  • 1. Department of Inorganic and Analytical Chemistry, Hebrew University, Jerusalem, 91904 (Israel)
  • 2. Department of Physical Chemistry, Israel Institute for Biological Research, Ness Ziona, 74100 (Israel)

Description

The formation and characterization of nanometer thick sol-gel films are reported. The films were prepared by spin-coating of a diluted solution of a silane precursor on a number of different substrates. The effect of dilution, rotation speed and nature of substrate on the thickness and homogeneity of the films was examined. Characterization of the films was carried out by profilometry, reflectance spectroscopy, atomic force microscopy, adhesion test and electrochemistry. We find that the dilution factor has a pronounced effect on the film thickness. Moreover, the time of dilution, namely, whether dilution was carried out before or after a period of hydrolysis, has a noticeable effect on the thickness as well as on the permeability of embedded species

Additional details

Identifiers

DOI
10.1016/j.tsf.2006.11.117;
PII
S0040-6090(06)01499-4;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
515
Journal Issue
11
Journal Page Range
p. 4624-4628
ISSN
0040-6090
CODEN
THSFAP

Optional Information

Copyright
Copyright (c) 2007 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.