Optimization of Langmuir Probe System Parameters in a Stationary Laboratory Plasma

In order to obtain creditable data an applicable method to optimize parameters of the Langmuir probes and circuits in a stationary laboratory device is investigated and an experimental criterion of the probe dimension is developed. To obtain the electron temperature and density the Electron Energy Distribution Function (EEDF) approach with less computing time and more accurate results is applied, instead of the conventional slope approach. Moreover the influence of the vessel wall materials on the plasma density is discussed briefly, indicating that the dielectric wall is helpful to enhancing the electron density