Basic thin film processing for high-Tc superconductors

Much attention has been paid for the thin films of perovskite-type oxides especially for the thin films of the high-Tc superconducting ceramics. Historically the thin films of the perovskite-type oxides have been studied as a basic research for ferroelectric materials. Thin films of BaTiO3 and PbTiO3 were tried to deposited and there ferroelectricity was evaluated. Recently this kind of perovskite thin films, including PZT (PbTiO3-PbZrO3) and PLZT [(Pb, La) (Zr, T)O3] have been studied in relation to the synthesis of thin film dielectrics, pyroelectrics, piezoelectrics, electro-optic materials, and acousto-optic materials. Thin films of BPB (BaPbO3- BaBiO3) were studied as oxide superconductors. At present the thin films of the rare-earth high-Tc superconductors of LSC (La1-xSrxCuO4) and YBC (YBa2Cu3O7-δ) have been successfully synthesized owing to the previous studies on the ferroelectric thin films of the perovskite- type oxides. Similar to the rare-earth high-Tc superconductors thin films of the rare-earth-free high-Tc superconductors of BSCC (Bi-Sr-Ca-Cu-O)9 and TBCC (Tl- Ba-Ca-Cu-O)10 system have been synthesized. In this section the basic processes for the fabrication of the high- Tc perovskite superconducting thin films are described