Trace moisture emissions from heated metal surfaces in hydrogen service
Creators
- 1. Matheson Tri-Gas, Incorporated, Advanced Technology Center, Longmont, Colorado 80501 (United States)
Description
The formation of trace moisture by exposure of dry heated surfaces of 316 L stainless-steel, Restek Silcosteel registered , and nickel 1/8 in. outer diameter line segments to purified Ar and H2 was studied using atmospheric pressure ionization mass spectrometry at flow rates of 2 slpm. Prior to H2 exposure, adsorbed moisture was removed by heating incrementally to 500 deg. C in an argon matrix, where the Restek Silcosteel registered material released a maximum of 50 ppb moisture at 300 deg. C and moisture spikes from the Ni and stainless-steel surfaces reached several 100 ppb. Upon exposure to H2, persistent low ppb moisture emissions due to the reduction of surface oxide species were observed at temperatures as low as 100 deg. C. Spikes at 300-500 deg. C ranged from ∼100 ppb for the stainless-steel lines to 400 ppb for the Restek Silcosteel registered material. The observed moisture emissions have to be considered as a potential contamination source for high-purity processes utilizing H2 purge at elevated temperatures
Additional details
Identifiers
- DOI
- 10.1116/1.1641053;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Journal Volume
- 22
- Journal Issue
- 2
- Journal Page Range
- p. 437-440
- ISSN
- 0734-2101
- CODEN
- JVTAD6
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36028131
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ARGON; ATMOSPHERIC PRESSURE; FLOW RATE; HYDROGEN; MASS SPECTROSCOPY; MOISTURE; NICKEL; OXIDES; STAINLESS STEEL-316L; SURFACES
- Descriptors DEC
- ALLOYS; AUSTENITIC STEELS; CARBON ADDITIONS; CHALCOGENIDES; CHROMIUM ALLOYS; CHROMIUM STEELS; CHROMIUM-MOLYBDENUM STEELS; CHROMIUM-NICKEL STEELS; CHROMIUM-NICKEL-MOLYBDENUM STEELS; CORROSION RESISTANT ALLOYS; ELEMENTS; FLUIDS; GASES; HEAT RESISTANT MATERIALS; HEAT RESISTING ALLOYS; HIGH ALLOY STEELS; IRON ALLOYS; IRON BASE ALLOYS; LOW CARBON-HIGH ALLOY STEELS; MATERIALS; METALS; MOLYBDENUM ALLOYS; NICKEL ALLOYS; NONMETALS; OXYGEN COMPOUNDS; RARE GASES; SPECTROSCOPY; STAINLESS STEELS; STEEL-CR17NI12MO3-L; STEELS; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENTS
Optional Information
- Notes
- (c) 2004 American Vacuum Society.