Published March 2004 | Version v1
Journal article

Trace moisture emissions from heated metal surfaces in hydrogen service

  • 1. Matheson Tri-Gas, Incorporated, Advanced Technology Center, Longmont, Colorado 80501 (United States)

Description

The formation of trace moisture by exposure of dry heated surfaces of 316 L stainless-steel, Restek Silcosteel registered , and nickel 1/8 in. outer diameter line segments to purified Ar and H2 was studied using atmospheric pressure ionization mass spectrometry at flow rates of 2 slpm. Prior to H2 exposure, adsorbed moisture was removed by heating incrementally to 500 deg. C in an argon matrix, where the Restek Silcosteel registered material released a maximum of 50 ppb moisture at 300 deg. C and moisture spikes from the Ni and stainless-steel surfaces reached several 100 ppb. Upon exposure to H2, persistent low ppb moisture emissions due to the reduction of surface oxide species were observed at temperatures as low as 100 deg. C. Spikes at 300-500 deg. C ranged from ∼100 ppb for the stainless-steel lines to 400 ppb for the Restek Silcosteel registered material. The observed moisture emissions have to be considered as a potential contamination source for high-purity processes utilizing H2 purge at elevated temperatures

Additional details

Identifiers

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Journal Volume
22
Journal Issue
2
Journal Page Range
p. 437-440
ISSN
0734-2101
CODEN
JVTAD6

Optional Information

Notes
(c) 2004 American Vacuum Society.