Numerical simulation of RF discharges for plasma processing

In this paper, we present kinetic models for radio-frequency glow discharges. Discussed are models for bulk electrons and positive ions based on the solution of the Boltzmann equation in a one-dimensional geometry. The resulting spatiotemporal behaviour of the electrons is used to compute the plasma emission, which is compared with experimental data. The model for the ions is used to solve the coupled dynamics of the electric field and the ion density in the whole discharge as well as the ion velocity distribution at the electrodes. The results are compared with experimental data and with the results of a Monte Carlo code. (orig.)