Non-contact thickness measurement of problematic layers using SEM with EDS detector

One of the most important characteristics of nanomaterial samples is their size. Methods for measuring the thickness of 0D, 1D and 2D materials are significantly limited (e.g. AFM, TEM). The scanning electron microscope method with EDS detector eliminates some limitations of thickness measurement. The solution of the problems of measuring the layers thickness 1D material is demonstrated on a carbon fiber brush electrode with a Br layer. These problems are the curvature of the sample and preparation of samples for the contact methods. This method can measure one or more layers of samples that have a high roughness and have no sharp edges. (authors)